Probe Stations for 6” (150 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on October 20, 2010

PSESLC6LMI0520

6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips

AUD

25159

 

or

$

24339

Probe Station kit for use with 150 mm / 6" wafers, Mitutoyo Finescope FS70, 2 large 1 µm micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is well suited for advanced measurements. It offers most of the capabilities of larger units. A 8" version is available.
FEATURES:
Compact size, 520 wide x 520 deep x 460 mm high (20.5" x 20.5" x 18")
Low weight, 132 lbs without scope
Affordable price
Ideal for 150 mm / 6" wafers
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty

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$

24339

€

17776

£

15665

AUD

25159

Rs1098667

Exchange rates for prices in Euro, GBP, AUD, Rs were valid on posting date, will be adjusted to invoice date if necessary.

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MICROSCOPE:
Type: Compound
Focus Block with coarse / fine focusing and 50mm travel
Standard head for visible range (378-1852)
10X eyepieces with eyeguards (378-856 + 2 * 218380)
Standard quadruple nosepiece (378-019)
Halogen light source (989-105)
Fiber o

SPECIFICATIONS:
150 mm / 6" stainless steel vacuum chuck
Chuck stage allows 6" x 6" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 5", 3" wafers, or dies
Z adjustment by moving platen up or down
Platen allows placement of up to 8 manipulators
Footprint: 520 x 520 mm (20.5" x 20.5")
Net weight of base: 45 kg or 99 lbs

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