Probe Stations for 6” (150 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on October 20, 2010

PSESLC6L

6in Probe Station kit, scope not included, 2 large micropositioners, probe holders and 1 box of tips

AUD

10660

 

or

$

10312

Probe Station kit for use with 6" wafers, Mitutoyo Stereo Zoom microscope not included, supply your own, 2 ball bearing micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is well suited for advanced measurements. It offers most of the capabilities of larger units. A 8" version is available.
FEATURES:
Compact size, 520 wide x 520 deep x 400 mm high (20.5" x 20.5" x 16")
Low weight, 99 lbs without scope
Affordable price
Ideal for 6" wafers
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty

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$

10312

€

7531

£

6637

AUD

10660

Rs465486

Exchange rates for prices in Euro, GBP, AUD, Rs were valid on posting date, will be adjusted to invoice date if necessary.

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No scope included

SPECIFICATIONS:
6" stainless steel vacuum chuck
Chuck stage allows 6" x 6" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 5", 3" wafers, or dies
Z adjustment by moving platen up or down
Platen allows placement of up to 8 manipulators
Footprint: 520 x 520 mm (20.5" x 20.5")
Net weight of base: 45 kg or 99 lbs

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